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Mini/Micro-LEDAOI Inspection Machine

COW/COTAOI is used for visual inspection of chips such as GaN, GaAs, and InP, and supports the inspection of 4-inch, 6-inch, 8-inch, and 12-inch wafers or COT samples.

Classification:

AOI testing equipment

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Product Detail

Device Functions

COW/COTAOI is used for Chip inspection for GaN, GaAs, InP, and other chips; supports inspection of 4-inch, 6-inch, 8-inch, and 12-inch wafers or COT samples.
Routine testing: Electrode abnormalities, epitaxial layer delamination, abnormal dicing lines, luminescent region abnormalities, residual gold, twin crystals, epitaxial defects.
Supports user‑defined or negotiated custom defect categories, with a minimum detectable defect size of 0.5 µm.
Deep learning systems and neural network algorithms can accurately classify defect types.
Production Capacity (WPH) @3X optics

3xCOW:4"@30mil, 4"@8mil, 6"@8mil, 6"@4mil

3xCOT: 4" @ 8 mil, 4" @ 4 mil

3xCOTD: 4" @ 8 mil, 4" @ 4 mil, 6" @ 8 mil, 6" @ 4 mil

Software Features: Wafer handling control, status indication, safety interlocks, data acquisition, measurement result data processing, recipe editing and management, defect review, graphical user interface, equipment condition logging.
User Permissions: Process Engineer, Equipment Engineer, Operator
Product Bin values can be defined according to user requirements.
Users can independently configure detection parameters and set card control standards.

Device Parameters

Device dimensions: Length 2300 mm × Width 1800 mm × Height 1900 mm
Equipment weight: 1000 kg
Rated voltage: AC/220V/2P 50Hz
Rated power: 10 kW
Compressed gas pressure: 5–7 bar
Pass rate: 99.5%
Noise: <60 dB

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